Products
Applicable industry: semiconductor (for cooling table)
Rotary Joint
ＭS series (2 ports)
Applications
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Cooling water supply to rotary table
Features
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A hollow hole can be drilled in the center of the rotary shaft of a rotary joint
Specifications
| Max. speed | 200 min-1 / rpm |
| Pressure | 0.5 MPa / 72.5 psi / 5 bar |
| Fluid | Pure water |
| Material |
SUS and more |
The above specifications are for reference only.
Actual specifications may vary depending on the model.
ＭS series (3 ports)
Applications
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Air supply for wafer pressurization
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Vacuum chuck for wafer holding
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Air supply for vacuum break
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Cooling water supply to rotary table
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Supply of pure water
Features
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Simultaneous supply of multiple fluids(pure water, vacuum and air) to the rotary table
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Capable of supporting up to 5 ports
Specifications
| Max. speed | 850 min-1 / rpm |
| Pressure | -0.1～0.6 MPa / -14.5～87 psi / -1～6 bar |
| Fluid | Vacuum / Air / Pure water |
| Material |
SUS and more |
The above specifications are for reference only.
Actual specifications may vary depending on the model.
Catalog download
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ROTARY JOINTS for semiconductor
Catalog
Rotary Joint
