Products
Applicable industry: semiconductor (for pure water / chemical / slurry) single port
Rotary Joint
Applications
- Air supply for wafer pressurization
- Vacuum chuck for wafer holding
- Air supply for vacuum break
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Cooling water supply to rotary table
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Supply of pure water / chemicals / slurry
* Depending on the specifications, water injection may be necessary.
Features
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Reduces elution of metal ions into the fluid with non-metallic internal wetted parts
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Internal wetted parts are made of chemically resistant materials
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Adaptable to air, vacuum, pure water and slurry thanks to wear resistance mechanical seal
Specifications
| Max. speed | 600 min-1 / rpm |
| Pressure | -0.1～1 MPa / -14.5～145 psi / -1～10 bar |
| Fluid | Air / Vacuum / Pure water / Chemical / Slurry and more |
| Material |
Body: PTFE / SUS Seal: SiC Wetted part: PTFE and more |
The above specifications are for reference only.
Actual specifications may vary depending on the model.
Catalog download
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ROTARY JOINTS for semiconductor
Catalog
Rotary Joint
