Products
Applicable industry: semiconductor (for CMP equipment)
Rotary Joint
EMF series (3 ports)
Applications
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Air supply for pressurization in air bag
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Air supply for depressurization in air bag
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Mainly for CMP equipment
Features
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Multi-port type suitable for simultaneous supply of multiple fluids (3 ports)
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Rotation without fluid is possible
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Mechanical seal structure
Specifications
| Max. speed | 150 min-1 / rpm |
| Pressure | -0.1～0.1 MPa / -14.5～14.5 psi / -1～1 bar |
| Fluid | Vacuum / Air |
| Material |
SUS and more |
The above specifications are for reference only.
Actual specifications may vary depending on the model.
MF series (3 ports)
Applications
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Air supply for pressurization in air bag
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Air supply for depressurization in air bag
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Mainly for CMP equipment
Features
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Multi-port type suitable for simultaneous supply of multiple fluids (3 ports)
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Rotation without fluid is possible
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Packing seal structure
Specifications
| Max. speed | 50 min-1 / rpm |
| Pressure | -0.1～0.3 MPa / -14.5～43.5 psi / -1～3 bar |
| Fluid | Vacuum / Air |
| Material |
SUS and more |
The above specifications are for reference only.
Actual specifications may vary depending on the model.
ＭＦES series (multi-port)
Applications
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Air supply for wafer pressurization
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Vacuum chuck for wafer holding
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Air supply for vacuum break
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Cooling water supply to rotary table
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Supply of pure water / chemicals / slurry
Features
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Multi-port type suitable for simultaneous supply of multiple fluids
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Reduces elution of metal ions into the fluid with non-metallic internal wetted parts
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Internal wetted parts are made of chemically resistant materials
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Adoption of wear resistance mechanical seal
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Capable of supporting up to 8 ports
Specifications
| Max. speed | 300 min-1 / rpm |
| Pressure | -0.1～1 MPa / -14.5～145 psi / -1～10 bar |
| Fluid | Air / Vacuum / Pure water / Chemical / Slurry and more |
| Material |
PTFE / SUS |
The above specifications are for reference only.
Actual specifications may vary depending on the model.
Catalog download
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ROTARY JOINTS for semiconductor
Catalog
Rotary Joint
