Medicine

Applicable industry: semiconductor (for pure water / chemical / slurry) single port

Reduces elution of metal ions into the fluid with non-metallic internal wetted parts.

Applicable industry: semiconductor (for vacuum chuck for wafer holding)

Low heat generation and minimal dust emission thanks to the clearance seal.

Applicable industry: semiconductor (for slip ring)

Slip rings can be combined thanks to hollow interior.

Applicable industry: semiconductor (for cooling table)

A hollow hole can be drilled in the center of the rotary shaft of a rotary joint.

Applicable industry: semiconductor (for CMP equipment)

Multi-port type suitable for simultaneous supply of multiple fluids (3 ports). Rotation without fluid is possible.

Rocky Insulator

We provide our customers with products made from phenolic resin materials and glass fibers, which are formed by heat and direct pressure integral molding using a molding machine, and which have been processed into various shapes. Thermal insulation, as well as strength, is a heat-resistant and heat-insulated plate that has been highly evaluated by customers.