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HOME > PRODUCTS INFORMATION > Deflashing & Cleaning Equipment for Semiconductor
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Rotating Union
Air Piston Valve
Deflashing & Cleaning Equipment for Semiconductor
High Pressure Hydro Power Cleaner
Plunger Pump
Deflashing & Cleaning Equipment for Semiconductor
Deflashing & Cleaning Equipment for Semiconductor
DI Water High Pressure Pump TCB-0100
Description DI Water High Pressure Pump
Application LCD, Wafer, Medical Apparatus, Precision Apparatus
Series TCB
di water high pressure pump tcb-0100 photo
  • The seal structure of the pure water which organic substance is not made.
  • Because it works by the low revolution, the life of the seal is long.
  • Twin-cam can save energy very low level.
  • Inline-filter / Pressure-switch was included into the device.
  • Twin-cam driving can reduce the vibration and the pulsation.
Outline
This system is high pressure pump for DI water. Supplied water pressure is increased up to 10Mpa, and used to spout out the water jet from the nozzle.
It consists of the booster and filter and solenoid valves. The nozzle is out of scope in standard version.
The pressure is controlled by flow consumption, i.e. inverter controlled motor frequency can adjust the water flow consumption. Including the remote control I/O interface, in order to the automatic operation.
Booster unit
Pressure 10Mpa (Max 15Mpa)
Flow Consumption Max 11.4L/min(60min-1)
Inverter Variably Control
Material in water contact area Stainless-steel, PTFE
High Pressure Inline-Filter
Element Material PolyethelsulfonePolypropyleneNBR
Filtering Quality 0.2 (rejected over 99%)
Pressure Difference Pressure difference IN-OUT
Filter Area 0.4m2
Material Stainless-Steel, NBR
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